Analysis of the key points for purchasing APCVD, LPCVD and PECVD tube furnaces

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Analysis of the key points for purchasing APCVD, LPCVD and PECVD tube furnaces

1. Comparison of core features and applicable scenarios

Type	Work Environment	Core Advantages	Typical application scenarios	Purchase focus
APCVD	Normal pressure environment	The equipment has a simple structure, fast deposition rate and low maintenance cost.	Thick film deposition (>1μm), silicon oxide layer with low purity requirements	Reaction gas consumption, temperature control accuracy (±5°C) 1
LPCVD	Low pressure (0.1-10 Torr)	High film uniformity, good step coverage, and less particle contamination	Polysilicon/silicon nitride deposition (such as TopCon cell Poly layer)	Vacuum system stability, temperature uniformity (±1°C) 12
PECVD	Low pressure + plasma assisted	Low temperature deposition (<450°C), high film density	Temperature sensitive materials (PERC/HJT cell passivation layer)	RF power stability, plasma uniformity1

2. Analysis of key purchasing parameters

Temperature control capability
LPCVD : High temperature (>600℃) is required. The life of the heating element and the uniformity of the temperature zone are the core. A multi-zone independent temperature control design is recommended.
PECVD : The low temperature advantage is obvious, but the RF power (such as 13.56MHz) needs to be matched to ensure plasma activity.

Film quality requirements
High uniformity : LPCVD is preferred (thickness fluctuation <±3%), and the reaction chamber gas flow design needs to be verified.
High bonding strength : PECVD ion bombardment can improve adhesion, but the substrate bias voltage needs to be controlled to avoid damage.

Production cost and efficiency
APCVD: Suitable for low-cost mass production, but with high gas consumption (gas utilization rate needs to be calculated).
LPCVD: The vacuum system consumes high power, but can process a larger amount of wafers (vertical loading design increases production capacity).
Special process compatibility
3D structure coating: The step coverage of LPCVD is >95%, which is better than 60-70% of APCVD.
Sensitive materials: PECVD is the only method that supports low-temperature film formation on polymers and flexible substrates.

CVD system

3. Maintenance and upgrade suggestions
APCVD: Clean the dust in the reaction chamber regularly and optimize the air inlet nozzle to prevent clogging.
LPCVD: The vacuum pump needs maintenance every 500 hours, and the life of the quartz tube is about 1 year (cost $3k-$5k).
PECVD: The failure rate of RF matching devices is relatively high, so it is recommended to purchase modular design models.

Tip: In current advanced processes such as 3D NAND, atomic layer deposition (ALD) is gradually replacing traditional CVD. If nanoscale films (<10nm) are involved, it is recommended to evaluate the compatibility of ALD equipment.

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Analysis of the key points for purchasing APCVD, LPCVD and PECVD tube furnaces

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