Application fields, system composition and operating procedures of rapid vacuum annealing furnace

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Application fields, system composition and operating procedures of rapid vacuum annealing furnace

Rapid vacuum annealing furnace is an advanced heat treatment equipment that can quickly heat and cool materials in a vacuum or specific gas environment. Application areas include ion implantation/contact annealing; rapid thermal treatment (RTP), rapid annealing (RTA), rapid thermal oxidation (RTO), rapid thermal nitriding (RTN); annealing, solution treatment, demagnetization and quenching of stainless steel products. It can be used in different gas atmospheres such as vacuum, inert atmosphere, oxygen, hydrogen, mixed gas, etc.; SiAu, SiAl, SiMo alloying; low dielectric materials; crystallization, densification; solar cell bonding; resistance sintering other thermal process requirements, etc. ...

System composition:

The system composition of rapid vacuum annealing furnace includes furnace body, furnace chamber, heating element, temperature control system, etc. These components together ensure the efficient operation and precise control of the equipment.

1. Furnace body and furnace chamber: usually made of high temperature resistant materials, filled with refractory fiber modules and high alumina foam bricks to improve thermal efficiency and thermal insulation performance. The furnace core made of new refractory materials can reduce energy consumption by 15% and increase the service life of the furnace.

2. Heating element: The corrugated strip heating element is fixed by high-aluminum porcelain nails to ensure uniform heating.

3. Temperature control system: PID programmable control is adopted, with over-temperature alarm and fault self-diagnosis functions.

4. A ventilator is installed on the furnace cover to force air circulation to make the temperature and gas in the furnace uniform. The furnace cover is sealed with the furnace core flange, and a vacuum device is connected to the furnace cover.

rapid vacuum annealing furnace (Click on the image to learn more)

Operating procedures and precautions:

1. When the furnace is used for the first time or has not been used for a long time, it should be baked at about 120℃ for 1 hour and at about 300℃ for 2 hours before use to avoid cracking the furnace. The furnace temperature should not exceed the rated temperature as much as possible to avoid damage to the heating element and furnace lining. It is forbidden to directly pour various liquids and dissolved metals into the furnace to keep the furnace clean.

2. If the furnace chamber uses quartz tubes, when the temperature is higher than 1000℃, the high temperature part of the quartz tube will become opaque. This is called devitrification (also called crystallization). It is an inherent defect of continuous melting quartz tubes and is a normal phenomenon.

3. When the cold furnace is used, since the furnace chamber is cold and needs to absorb a lot of heat, the heating rate of the low temperature section should not be too fast, and the heating rate of each temperature section should not be too different. When setting the heating rate, the physical and chemical properties of the sintered material should be fully considered to avoid spraying and contaminating the furnace tube.

4. Regularly check whether the electrical connection part of the temperature control system is in good contact, and pay special attention to whether the connection points of the heating element are tight.

5. After the furnace has been used for a period of time, if the vacuum degree decreases, the temperature-resistant silicone ring between the stainless steel flanges can be replaced or the stainless steel flanges can be reinstalled or the vacuum system can be replaced and repaired to improve the overall vacuum degree of the system.

6. During the operation of the furnace, if the control deviation cannot be eliminated at about 300℃, the temperature display value does not match the program given value or the swing is too large, check whether the parameters "M5, P, t" are set correctly.

The above is some basic knowledge about rapid vacuum annealing furnace. If you need to know more, please contact us. We are professional vacuum furnace manufacturer.

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Application fields, system composition and operating procedures of rapid vacuum annealing furnace

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