1. Input: single-phase AC220V, 50Hz / 60Hz, power <2.16KW (excluding vacuum pump)
2. Evaporation output: voltage AC 0-8V continuously adjustable, limiting evaporation current 200A, limiting evaporation power <1.6KW
3. Vacuum chamber: Ø300mm (inner diameter) × 400mm, stainless steel, the inner wall is electro-polished
4. Observation window: Ø100mm, sealed with special sealing ring
5. Vacuum pump: high pumping speed turbo molecular pump, pumping speed 600L / s
6. Vacuum: 8.0x10-4Pa
7. Ultimate vacuum 8.0x10-5Pa
8. Leakage rate: 6.7 × 10-8Pa · L / S
9. Sample stage: φ120
10. The distance between the evaporation boat and the sample table: 150-210mm
11. Demand for cooling water: 15L / min
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