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Evaporative Coating Apparatus
model:PT-1800X-ZF4

Evaporative Coating Apparatus

    Application:  Widely used in universities/institutes/and high-tech enterprises in the field of semiconductor and microelectronics.
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Detailed Parameters Of The Product

Brief Introduction:twgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

     PT-1800X-ZF4 Evaporative Coating Apparatus is a high-vacuum evaporative coating apparatus, especially suitable for the evaporation of metal films (such as Ti, Al, Au, etc.) that are sensitive to oxygen and small molecules of organic matter. The machine is equipped with 4 evaporation heating boats, each heating boat can be independently vaporized. There is a rotatable baffle above the heating boat. When one of the heating boats is evaporated, the baffle covers the other three tungsten boats To prevent contamination between the evaporation materials. If part of the configuration is changed, the evaporation coating of organic materials can also be achieved, which can meet the research requirements of light-emitting devices and organic solar cells. It is an experimental equipment with ideal coating effect and high cost performance. The bottom of the cavity of the PT-1800X-ZF4 evaporation coating instrument is equipped with 5 water-cooled electrodes, which can effectively protect the electrode temperature from melting due to excessive temperature during the working process, and thus damage the electrode. The machine uses a metal chamber with a very high vacuum degree, the vacuum degree can reach 5.0 × 10-7torr, the sample stage can heat the sample, the heating temperature is room temperature -500 ℃, is the first choice for high vacuum evaporation coating.twgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Evaporative Coating ApparatustwgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 Main Specification:twgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

twgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Product Name

Evaporation CoatingtwgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Product  ItemtwgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

PT-1800X-ZF4twgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Main FeaturestwgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

1. The vacuum control units are all assembled in one control box.twgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

2. Adopt independent evaporation current controller, convenient and fast operation.twgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

3. The vacuum chamber is equipped with a KF40 side extraction valve (directly connected to the pre-stage mechanical pump to improve efficiency), a CF150 gate valve (directly connected to the molecular pump), and a KF16 flange (installed resistance gauge) 6. 6 CF35 flanges (1 with ionization gauge, 1 with 2-core electrode, and 1 with thickness gauge) 3 spares.twgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

4. Equipped with 5 water-cooled electrodes at the bottom of the cavity, which can support 4 evaporation heating boats.twgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

5. The sample stage is installed on the top of the cavity.twgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

6. A high-resolution film thickness gauge can be installed in the cavity, and the resolution (aluminum) of the film thickness measurement is 0.1Å.twgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

7. Circulating water cooler can be used.twgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

SpecificationtwgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

1. Input: single-phase AC220V, 50Hz / 60Hz, power <2.16KW (excluding vacuum pump)twgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

2. Evaporation output: voltage AC 0-8V continuously adjustable, limiting evaporation current 200A, limiting evaporation power <1.6KWtwgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

3. Vacuum chamber: Ø300mm (inner diameter) × 400mm, stainless steel, the inner wall is electro-polishedtwgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

4. Observation window: Ø100mm, sealed with special sealing ringtwgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

5. Vacuum pump: high pumping speed turbo molecular pump, pumping speed 600L / stwgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

6. Vacuum: 8.0x10-4PatwgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

7. Ultimate vacuum 8.0x10-5PatwgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

8. Leakage rate: 6.7 × 10-8Pa · L / StwgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

9. Sample stage: φ120twgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

10. The distance between the evaporation boat and the sample table: 150-210mmtwgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

11. Demand for cooling water: 15L / mintwgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

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