Main FeaturesC4oMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
|
1. The vacuum control units are all assembled in one control box.C4oMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
2. Adopt independent evaporation current controller, convenient and fast operation.C4oMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
3. The vacuum chamber is equipped with a KF40 side extraction valve (directly connected to the pre-stage mechanical pump to improve efficiency), a CF150 gate valve (directly connected to the molecular pump), and a KF16 flange (installed resistance gauge) 6. 6 CF35 flanges (1 with ionization gauge, 1 with 2-core electrode, and 1 with thickness gauge) 3 spares.C4oMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
4. Equipped with 5 water-cooled electrodes at the bottom of the cavity, which can support 4 evaporation heating boats.C4oMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
5. The sample stage is installed on the top of the cavity.C4oMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
6. A high-resolution film thickness gauge can be installed in the cavity, and the resolution (aluminum) of the film thickness measurement is 0.1Å.C4oMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
7. Circulating water cooler can be used.C4oMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
|
SpecificationC4oMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
|
1. Input: single-phase AC220V, 50Hz / 60Hz, power <2.16KW (excluding vacuum pump)C4oMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
2. Evaporation output: voltage AC 0-8V continuously adjustable, limiting evaporation current 200A, limiting evaporation power <1.6KWC4oMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
3. Vacuum chamber: Ø300mm (inner diameter) × 400mm, stainless steel, the inner wall is electro-polishedC4oMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
4. Observation window: Ø100mm, sealed with special sealing ringC4oMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
5. Vacuum pump: high pumping speed turbo molecular pump, pumping speed 600L / sC4oMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
6. Vacuum: 8.0x10-4PaC4oMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
7. Ultimate vacuum 8.0x10-5PaC4oMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
8. Leakage rate: 6.7 × 10-8Pa · L / SC4oMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
9. Sample stage: φ120C4oMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
10. The distance between the evaporation boat and the sample table: 150-210mmC4oMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
11. Demand for cooling water: 15L / minC4oMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
|