Main Featuresj5aMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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1. The vacuum control units are all assembled in one control box.j5aMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
2. Adopt independent evaporation current controller, convenient and fast operation.j5aMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
3. The vacuum chamber is equipped with a KF40 side extraction valve (directly connected to the pre-stage mechanical pump to improve efficiency), a CF150 gate valve (directly connected to the molecular pump), and a KF16 flange (installed resistance gauge) 6. 6 CF35 flanges (1 with ionization gauge, 1 with 2-core electrode, and 1 with thickness gauge) 3 spares.j5aMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
4. Equipped with 5 water-cooled electrodes at the bottom of the cavity, which can support 4 evaporation heating boats.j5aMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
5. The sample stage is installed on the top of the cavity.j5aMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
6. A high-resolution film thickness gauge can be installed in the cavity, and the resolution (aluminum) of the film thickness measurement is 0.1Å.j5aMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
7. Circulating water cooler can be used.j5aMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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Specificationj5aMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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1. Input: single-phase AC220V, 50Hz / 60Hz, power <2.16KW (excluding vacuum pump)j5aMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
2. Evaporation output: voltage AC 0-8V continuously adjustable, limiting evaporation current 200A, limiting evaporation power <1.6KWj5aMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
3. Vacuum chamber: Ø300mm (inner diameter) × 400mm, stainless steel, the inner wall is electro-polishedj5aMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
4. Observation window: Ø100mm, sealed with special sealing ringj5aMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
5. Vacuum pump: high pumping speed turbo molecular pump, pumping speed 600L / sj5aMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
6. Vacuum: 8.0x10-4Paj5aMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
7. Ultimate vacuum 8.0x10-5Paj5aMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
8. Leakage rate: 6.7 × 10-8Pa · L / Sj5aMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
9. Sample stage: φ120j5aMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
10. The distance between the evaporation boat and the sample table: 150-210mmj5aMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
11. Demand for cooling water: 15L / minj5aMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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