Zhengzhou Protech
Zhengzhou Protech
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Manual four-source inorganic thermal evaporation coating equipment
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Manual four-source inorganic thermal evaporation coating equipment

    Application:  Widely used in universities/institutes/and high-tech enterprises in the field of semiconductor and microelectronics.
Contact us for customize send-email: info@lab-furnace.com
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Detailed Parameters Of The Product
The equipment is mainly composed of metal source evaporation deposition chamber, vacuum exhaust system; vacuum measurement system; evaporation source; sample heating and temperature control; electrical control system; gas distribution system; cooling circulation system and other parts, which can be used for OLED preparation and perovskite Study on the preparation of mineral thin films.2j7Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 2j7Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Part I: System Overview2j7Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
This system is a four-chamber inorganic thermal evaporation system with a single-chamber front door structure. It is mainly used for the research of growing metal thin films. The specific configuration of the system is as follows:2j7Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
1. The system adopts a single-chamber tube top cover structure.2j7Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
2. A mask can be applied to the sample stage.2j7Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
3. Sample size: 100 × 100mm.2j7Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
4. The growth chamber is equipped with an imported quartz crystal film thickness monitor for film thickness control and a single water-cooled quartz crystal probe.2j7Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
5. 4 thermal resistance evaporation boats are placed in the growth chamber, equipped with 2 sets of evaporation power sources. The evaporation power source has a transfer function, that is, one evaporation power source can control two thermal resistance evaporation boats through the transfer.2j7Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
6. Growth chamber vacuum acquisition system uses domestic molecular pump (600L / S) + mechanical pump (4L / S) for pumping air;2j7Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
7. All the vacuum chamber components and components are made of high-quality stainless steel materials, argon arc welding, and the surface treatment is the most advanced electrochemical polishing passivation process in China.2j7Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 2j7Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Part II: The main components and technical performance of the system2j7Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Growth chamber ultimate vacuum ≤4.0 x10-5 Pa;2j7Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
pumping speed: 6 x 10-4 Pa can be reached in 30 minute2j7Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
1.Vacuum chamber components2j7Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Dimensions of vacuum chamber cavity components: single chamber cylindrical front door structure vacuum chamber, about Φ350 × H380, the upper flange is the docking structure of the sample stage, the vacuum chamber design adopts ultra-high vacuum design, wall-mounted antifouling board, and high quality stainless steel Material manufacturing, argon arc welding, surface treatment adopts a new process of glass shot + chemical electrolytic polishing passivation treatment.2j7Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
The vacuum chamber components are welded with flanges of various specifications as follows:2j7Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
1.1 RF100 flange connector on the vacuum chamber head: 1 (connected to the sample assembly);2j7Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
1.2 CF150 flange interface: 1 (molecular pump interface);2j7Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
1.3 CF35 flange interface: 4 (connected to high vacuum ionization gauge, film thickness meter, side pump, baking lighting, etc.);2j7Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
1.4 LF16 flange interface: 2 (inflatable valve, 1 spare);2j7Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
1.5 KF16 flange interface: 1 (connected to low vacuum resistance gauge);2j7Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
1.6 There is an RF100 observation window with glass baffle on the cavity.2j7Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
1.7 Thermal resistance evaporation electrode interface: 4 sets2j7Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
1.8 Evaporation source baffle interface: 42j7Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
2j7Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 2j7Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
2. Thermal resistance evaporation boat and power supply 2j7Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
2.1 4 sets of thermal evaporation electrode group (high-power water-cooled structure);2j7Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
2.2 2 sets of thermal resistance evaporation power supply (power 3kw), manual switching to meet the evaporation requirements of 2 evaporation boats; thermal resistance evaporation crucible2j7Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
The pot is matched according to the evaporation material (4 tungsten and molybdenum boats); there is a temperature interference prevention device between the evaporation sources2j7Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
2.3 Evaporation source baffle: 4 sets of manual control.2j7Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 2j7Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
3.Sample stage 2j7Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
3.1 Substrate size: 100 × 100mm substrates; (according to drawings provided by the teacher)2j7Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
3.2 The substrate stage motor is driven by magnetic coupling and sealed drive, and the rotation speed is adjustable from 0 to 20 rpm; the sample stage can be heated: the temperature is from room temperature to 400 ℃, and the temperature is controlled by a temperature meter imported from Japan. The evaporation distance is 300mm.2j7Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 2j7Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
4.Vacuum background pumping and vacuum measurement 2j7Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
4.1 Compound molecular pump: FF-600 molecular pump 1 set2j7Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
4.2 Mechanical pumps and solenoid valves: Pumping speed 4 liters per second2j7Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
4.3 Metal hose connected with molecular pump and mechanical pump: 1 set2j7Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
4.4 Composite digital vacuum gauges and gauges (Chengdu Ruibao): 1 set2j7Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Thermocouple gauge: (KF16 quick release flange) 1.0x103Pa --- 1.0x10-1Pa x 12j7Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Ionization gauge: (CF35 blade flange) 1.0x10-1Pa --- 1.0x10-5Pa x12j7Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
4.5 Manual air release valve and manual inflation valve: 2 for vacuum chamber release and vacuum inflation2j7Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
4.6 DN40 solenoid shut-off valve x 12j7Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 2j7Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
5. Water chiller 2j7Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
6.Vacuum chamber lighting device2j7Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
7. Baking lighting device 2j7Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
8. Film thickness meter (SQM-160) 2j7Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
10. Leak detection and reserved spare ports in the vacuum chamber are reserved.
2j7Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

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