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model:PT-T1200

LCD Touch Screen 3 Zones Tube Furnace

Application

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Detailed Parameters Of The Product

Product Description:
PT-T1200 CVD is a tube furnace with 80mm diameter alumina tube vacuum pump and three channels Mass Flow Meters gas flowing system. It can mix 1-3 types of gases for CVD or diffusion.
Technical Parameter:

Model	PT-T1200 CVD with 3 MFC Gas channels
Display	LED
Max. Temperature	1200℃ for short time
Continuous Working Temp.	≤1100℃
Heating Rate	Suggestion: 0~10℃/min
Temperature Zone	220mm+220mm+220mm
Heating Element	Resistance Wire With Mo
Thermocouple	K Type
Temperature Control Accuracy	±1℃
Tube Size	80x1200mm (OD x L)
Tube Block	Two fibrous ceramic blocks are included for blocking heat radiation from inside tube (Ceramic blocks must be fully inserted into the furnace chamber before heating).
Temperature Control	PID automatic control via SCR power control
Program and Ramps	30 steps programmable
Vacuum Flange	Stainless Steel vacuum flange with valves
Power	220V, 50 Hz, single phase at max.6KW
Mass Flow Meters	Three precision mass flow meters : MFC 1: Gas flow range from 0~100 sccm MFC 2: Gas flow range from 0~200 sccm MFC 3: Gas flow range from 0~200 sccm (Gas flow range can be according to your requirement) One gas mixing tank is installed on bottom case with 3 stainless steel needle valves is installed on left side of bottom case to control 3 type gases mixing manually Below photo is 4 MFC for reference. 3 MFC will be with 3 displays