Zhengzhou Protech
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PECVD RF rotary tube furnace
model:PT-TX1100-S50LK1

PECVD RF rotary tube furnace

    Application:  The PECVD rotary tube furnace system is suitable for surface film deposition of powder materials. The system consists of a high-power RF power supply (500W, 13.56MHz), a vacuum system, and a rotary tube furnace. Utilize plasma characteristics to control or influence gas phase reactions and chemical reaction processes on material surfaces, and deposit thin films at appropriate temperatures.
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Detailed Parameters Of The Product
Specific Introduction:

The PECVD rotary tube furnace system is suitable for surface film deposition of powder materials. The system consists of a high-power RF power supply (500W, 13.56MHz), a vacuum system, and a rotary tube furnace. Utilize plasma characteristics to control or influence gas phase reactions and chemical reaction processes on material surfaces, and deposit thin films at appropriate temperatures. PECVD deposited thin films have good electrical properties, good substrate adhesion, and good step coverage, which make them widely used in fields such as large-scale integrated circuits, optoelectronic devices, MEMS, and so on. Click to view more PECVD devices!QLXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Real shot of PECVD RF rotary tube furnaceQLXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Real shot of PECVD RF rotary tube furnaceQLXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

QLXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Features:

1. PECVD has the advantages of low basic temperature, fast deposition rate, good film quality, fewer pinholes, and less cracking;QLXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
2. In the PECVD process, due to the impact of high-speed electrons in the plasma on neutral reaction gas molecules, neutral reaction gas molecules will become fragments or be in an activated state, which is prone to reactions;QLXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
3. By utilizing radio frequency and other means, gases containing atoms composed of thin films can form a plasma locally, which has strong chemical activity and is prone to reactions, resulting in the deposition of the desired thin film on the substrate;QLXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
4. The vacuum system consists of a rotary vane vacuum and a digital vacuum gauge, with a cold limit vacuum degree of up to 10Pa;QLXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
5. Adopting quick connect flange sealing, easy and fast loading and unloading;QLXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
6. The heating area adopts a single temperature zone with a heating zone of 200mm, which is easy to operate, reliable in sealing, and has high comprehensive performance indicators.QLXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
7. The furnace tube adopts customized variable diameter furnace tube, with a quartz feeding table inside the tube wall, allowing the material to be heated more fully. The furnace tube rotates at 360 ℃ and the rotation speed is adjustable.QLXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
8. The temperature control system adopts PID intelligent program for temperature control, and can set multiple temperature rise and fall programs.QLXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
9. The flange is equipped with an inlet and outlet cyclone adapter, which can introduce inert protective gases such as nitrogen and argon, and can be used in atmospheric environments.QLXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
10. Safety protection, with over temperature protection function. When the temperature exceeds the allowable setting value, the automatic alarm protection function ensures safe and reliable operation.QLXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
11. Our company has the ability to independently develop, design, produce, and process our machines. We provide lifelong parts replacement and upgrade services.
QLXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Real shot of Vertical mini tube furnaceQLXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Real shot of Vertical mini tube furnaceQLXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Technical parameters:
Product name PE rotary tube furnace
Product model PT-TX1100-S50LK1
Furnace material The furnace adopts alumina polycrystalline fibers
Furnace tube size Both ends have a diameter of approximately Φ 30mm, middle size Φ 50mm total length approximately 1200mm
Heating zone 200mm
Furnace tube material Quartz furnace tube
Working temperature ≤1000℃
Maximum temperature 1100℃
Heating element Alloy heating wire
Temperature control accuracy ±1℃
Heating rate 0-20 ℃/min, recommended 10 ℃/min, adjustable according to experimental process
Temperature testing element K-type thermocouple
Temperature control system Adopting intelligent multi-stage PID programmable controlOvw High Temperature Box Resistance Furnace, Tube Furnace, Vacuum Annealing Furnace, Vacuum Sintering Furnace, Tube High Temperature Furnace - Zhengzhou Kejia Electric Furnace Co., LtdQLXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
The temperature control system adopts artificial intelligence regulation technology, with PID regulation and self tuning functions, and can program multiple temperature rise and fall programs;Ovw High Temperature Box Resistance Furnace, Tube Furnace, Vacuum Annealing Furnace, Vacuum Sintering Furnace, Tube High Temperature Furnace - Zhengzhou Kejia Electric Furnace Co., LtdQLXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
1. Adopting PID method to adjust and control temperature, multiple temperature rise and fall programs can be setOvw High Temperature Box Resistance Furnace, Tube Furnace, Vacuum Annealing Furnace, Vacuum Sintering Furnace, Tube High Temperature Furnace - Zhengzhou Kejia Electric Furnace Co., LtdQLXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
2. Temperature control accuracy ± 1 º COvw High Temperature Box Resistance Furnace, Tube Furnace, Vacuum Annealing Furnace, Vacuum Sintering Furnace, Tube High Temperature Furnace - Zhengzhou Kejia Electric Furnace Co., LtdQLXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
3. Equipped with over temperature protection and couple breaking protection. When over temperature or couple breaking occurs, the heating circuit of the electric furnace will automatically cut offOvw High Temperature Box Resistance Furnace, Tube Furnace, Vacuum Annealing Furnace, Vacuum Sintering Furnace, Tube High Temperature Furnace - Zhengzhou Kejia Electric Furnace Co., LtdQLXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
4. The instrument has the function of temperature self-tuning
Sealing method The sealing method using magnetic fluid and vacuum flange provides better sealing effect
Rotation rate 15rpm/min adjustable
Rotating structure Rotating method, the furnace tube can rotate at 360 ℃, and the furnace body can tilt
Working voltage AC 220v 50Hz
Heating power 2KW
Vacuum system 1. Adopting DRV-10 rotary vane vacuum pump, the cold state limit vacuum degree can reach 10Pa, and the vacuum pump includes a dust filterOvw High Temperature Box Resistance Furnace, Tube Furnace, Vacuum Annealing Furnace, Vacuum Sintering Furnace, Tube High Temperature Furnace - Zhengzhou Kejia Electric Furnace Co., LtdQLXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
2. KF quick connect, stainless steel corrugated pipe, manual baffle valve and flange, connected to vacuum pump;Ovw High Temperature Box Resistance Furnace, Tube Furnace, Vacuum Annealing Furnace, Vacuum Sintering Furnace, Tube High Temperature Furnace - Zhengzhou Kejia Electric Furnace Co., LtdQLXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
3. Digital vacuum gauge display
Plasma power supply system Power range 0-500W (continuously adjustable)Ovw High Temperature Box Resistance Furnace, Tube Furnace, Vacuum Annealing Furnace, Vacuum Sintering Furnace, Tube High Temperature Furnace - Zhengzhou Kejia Electric Furnace Co., LtdQLXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Operating frequency 13.56MHZ+0.005%Ovw High Temperature Box Resistance Furnace, Tube Furnace, Vacuum Annealing Furnace, Vacuum Sintering Furnace, Tube High Temperature Furnace - Zhengzhou Kejia Electric Furnace Co., LtdQLXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Working mode:Continuous outputOvw High Temperature Box Resistance Furnace, Tube Furnace, Vacuum Annealing Furnace, Vacuum Sintering Furnace, Tube High Temperature Furnace - Zhengzhou Kejia Electric Furnace Co., LtdQLXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
RF output impedance interface N-type, female (50 Ω)Ovw High Temperature Box Resistance Furnace, Tube Furnace, Vacuum Annealing Furnace, Vacuum Sintering Furnace, Tube High Temperature Furnace - Zhengzhou Kejia Electric Furnace Co., LtdQLXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Power stability ≤ 2WOvw High Temperature Box Resistance Furnace, Tube Furnace, Vacuum Annealing Furnace, Vacuum Sintering Furnace, Tube High Temperature Furnace - Zhengzhou Kejia Electric Furnace Co., LtdQLXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Maximum reflected power 70WOvw High Temperature Box Resistance Furnace, Tube Furnace, Vacuum Annealing Furnace, Vacuum Sintering Furnace, Tube High Temperature Furnace - Zhengzhou Kejia Electric Furnace Co., LtdQLXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Power protection settings include DC overcurrent protection, amplifier over temperature protection, and reflected power protectionOvw High Temperature Box Resistance Furnace, Tube Furnace, Vacuum Annealing Furnace, Vacuum Sintering Furnace, Tube High Temperature Furnace - Zhengzhou Kejia Electric Furnace Co., LtdQLXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Supply voltage/frequency single-phase AC (187V-253V) 50-60HZOvw High Temperature Box Resistance Furnace, Tube Furnace, Vacuum Annealing Furnace, Vacuum Sintering Furnace, Tube High Temperature Furnace - Zhengzhou Kejia Electric Furnace Co., LtdQLXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Cooling method: air cooling
Provide relevant accessories Lifetime warranty for crucible hooks, high-temperature gloves, thermocouples, customized furnace plugs, manuals, warranty cards, etc
After sales service 12 month warranty, lifetime warranty (free accessories such as heating elements and furnace tubes are not included in the warranty scope)

Real shot of Vertical mini tube furnaceQLXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Real shot of Vertical mini tube furnaceQLXMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

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