PECVD furnace(Plasma Enhanced Chemical Vapor Deposition), which consists of 500W RF plasma source, 2" or 3.14" O.D optional split tube furnace, 4 channels precision mass flow meter with gas mixing tank, and high quality mechanical pump.The PE-CVD furnace is an ideal and affordable tool to deposit thin films or grow nano-wire from a gas state (vapor) to a solid state.
|Split Tube furnace||
· Input power: 208 – 240V AC, 1.2kW
· 1200°C Max. working temperature for < 60 minutes
· 1100°C Max for continuous heating
· High purity quartz tube 2"OD x 1.7"ID x 39.4" Length
· 30 segments programmable precision digital temperature controller
· 8" (200mm), single zone. 2.3" (60mm)
Plasma RF Generator
· Output Power: 5 -500W adjustable with ± 1% stability
· RF frequency: 13.56 MHz ±0.005% stability
· Reflection Power: 200W max.
· Matching: Automatic
· RF Output Port: 50 Ω, N-type, female
· Noise: <50 dB.
· Cooling: Air cooling.
· Power : 208-240VAC, 50/60Hz
Anti-corrosive Pressure Gauge
· 3.8x10-5 to 1125 Torr measurement range
· Anti-corrosive, gas-type independent
· High accuracy and reproducibility at atmosphere for reliable
· atmospheric pressure detection
· Fast atmospheric detection eliminates waiting time and shortens
· process cycle
· Easy to exchange plug & play sensor element
· Click pic to view detal spec.
|Mass Flow meters||
· Four precision mass flow meters (0.02% accuracy)
· with digital display are installed on the bottom case to control gas
flow rate automatically.
· MFC 1: Gas flow range from 0~100 sccm
· MFC 2&3: Control range from 0~200 sccm
· MFC 4: Control range from 0~500 sccm
· One gas mixing tank is installed on bottom case with liquid release valve
· 4 stainless steel needle valves is installed on left side of bottom
case to control 4type gases mixing manually
· Gas inlet fitting: four 1/4NPS
· Gas outlet fitting: four 1/4NPS
· AC 220V 50 Hz 1/2HP 375W
· 2 Liter /S or 120 liter/m
· Oil trap (inlet) and exhaust filter (outlet) are installed.
One year limited warranty with lift time support (Consumable parts such
as processing tubes, o-rings and heating elements are not covered
by the warranty, please order the eplacement at related products below.)
The furnace can be customized according to customers’ requirements.