Description:W3PMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
PECVD furnace for producing large area graphene films,is widely used product high quality sio2 film,si3N4 film,diamond film,hard thin film,optical thin film and CNT etc.W3PMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
W3PMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Descriptions of PECVD furnace:W3PMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
PCVED by microwave or radio frequency make gas ionization containing film the W3PMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
constituent atoms,in a local plasma formation,and plasma chemical activity is very strong,is easy to react,sedimentary out the desired film on substrate,it widely used product high quality sio2 film,si3N4 film,diamond film,hard thin film,optical thin film and CNT etc.W3PMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
W3PMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Outstanding features of PECVD furnace :W3PMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
1. Lower temperature processing compared to conventional CVD. W3PMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
2. Film stress can be controlled by high/low frequency mixing techniques. W3PMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
3. Control over stoichiometry via process conditions.W3PMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
4. Offers a wide range of material deposition, including SiOx, SiNx, SiOxNy andAmorphous silicon (a-Si:H) deposition.W3PMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
W3PMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Technical parameters of PECVD furnace :W3PMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Model |
PT-1200-4-80(440) PECVD |
Tube Furnace |
Display |
LED |
Max. Temperature |
1200℃ |
Continuous Woking Temp. |
≤1100℃ |
Heating Rate |
0~10℃/min |
Temperature Zone |
Single |
Accuracy |
±1℃ |
Tube Size |
80*440mm(OD*heating zone) |
Temperature Control |
PID automatic control via SCR power control |
Heating curves |
30 steps programmable |
Power |
220V,50 Hz Single phase, |
Plasma RF PowerW3PMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
supply |
Output Power |
5 -300W adjustable with ± 1% stability |
RF frequency |
13.56 MHz ±0.005% stability |
Reflection Power |
200W max. |
Matching |
Automatic |
RF Output Port |
50 Ω, N-type, female |
Noise |
<50 dB. |
Cooling |
Air cooling. |
Power |
220V, 50Hz |
Vacuum Pump |
KFD25 adapter and stainless steel pipe are connected between pumpW3PMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
tube flange with precision ball valveW3PMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Digital vacuum pressure gauge and display are installed with the furnace |
Mass Flow meters |
Four precision mass flow meters :W3PMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
MFC 1: O2 flow range from 0~500 sccmW3PMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
MFC 2: H2 flow range from 0~500 sccmW3PMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
MFC 3: N2 flow range from 0~500 sccm W3PMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
MFC 4: Ar flow range from 0~500 sccmW3PMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
One gas mixing tank is installed on bottom case with liquid release valveW3PMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
4 stainless steel needle valves is installed on left side of bottom case toW3PMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
control 4type gases mixing manuallyW3PMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Gas inlet fitting: four 1/4NPSW3PMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Gas outlet fitting: four 1/4NPS |
W3PMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
PECVD furnace can be customized according to customers’requirements.W3PMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
We have a wide range of different optional function furnace to meet different heating requirement, also we accept customer design furnace R&D working, please email us your specific requirement, we will recommend most reasonable choice for you, thanks!W3PMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac