PECVD furnace for producing large area graphene films,is widely used product high quality sio2 film,si3N4 film,diamond film,hard thin film,optical thin film and CNT etc.
Descriptions of PECVD furnace:
PCVED by microwave or radio frequency make gas ionization containing film the
constituent atoms,in a local plasma formation,and plasma chemical activity is very strong,is easy to react,sedimentary out the desired film on substrate,it widely used product high quality sio2 film,si3N4 film,diamond film,hard thin film,optical thin film and CNT etc.
Outstanding features of PECVD furnace :
1. Lower temperature processing compared to conventional CVD.
2. Film stress can be controlled by high/low frequency mixing techniques.
3. Control over stoichiometry via process conditions.
4. Offers a wide range of material deposition, including SiOx, SiNx, SiOxNy andAmorphous silicon (a-Si:H) deposition.
Technical parameters of PECVD furnace :
|Continuous Woking Temp.||≤1100℃|
|Tube Size||80*440mm(OD*heating zone)|
|Temperature Control||PID automatic control via SCR power control|
|Heating curves||30 steps programmable|
|Power||220V,50 Hz Single phase,|
Plasma RF Power
|Output Power||5 -300W adjustable with ± 1% stability|
|RF frequency||13.56 MHz ±0.005% stability|
|Reflection Power||200W max.|
|RF Output Port||50 Ω, N-type, female|
KFD25 adapter and stainless steel pipe are connected between pump
tube flange with precision ball valve
Digital vacuum pressure gauge and display are installed with the furnace
|Mass Flow meters||
Four precision mass flow meters :
MFC 1: O2 flow range from 0~500 sccm
MFC 2: H2 flow range from 0~500 sccm
MFC 3: N2 flow range from 0~500 sccm
MFC 4: Ar flow range from 0~500 sccm
One gas mixing tank is installed on bottom case with liquid release valve
4 stainless steel needle valves is installed on left side of bottom case to
control 4type gases mixing manually
Gas inlet fitting: four 1/4NPS
Gas outlet fitting: four 1/4NPS
PECVD furnace can be customized according to customers’requirements.
We have a wide range of different optional function furnace to meet different heating requirement, also we accept customer design furnace R&D working, please email us your specific requirement, we will recommend most reasonable choice for you, thanks!