max. temp | 1200℃ |
working temp. | ≤1100℃ |
tube size | Φ150mm |
insulation material | Alumina, high temperature fiber products |
thermocouple | K type |
temp. accuracy | ±1℃ |
temp. control |
· PID automatic control and auto-tune function. · 30 programmable segments for precise thermal processing. · Built-in protection for the over-heated and broken thermocouple. |
Heating Zone Length | 200+200+200mm |
Heating Element | Fe-Cr-Al Alloy doped by Mo |
power | single phase,220V,50Hz |
Power output | 0W~1000W |
Maximum reflected power | 200W |
RF output interface | 50 Ω, N-type, female |
Power stability | ≤5W |
Harmonic component | ≤-50dbc |
voltage | single phase (187V-253V) 50/60HZ |
Machine efficiency | >=70% |
cooling | air cooling |
Connector style | Double cutting ferrule stainless steel connector |
Standard range(N2) |
200sccm,500sccm、1000sccm (optional) |
Accuracy | ±1.5%F.S |
Linearity | ±1%F.S |
Repeat accuracy | ±0.2%F.S |
Response time | gas:1~4 Sec,electricity:10 Sec |
Working pressure range | 0.1~0.5 MPa |
Max.pressure | 3MPa |
Connector | Φ6,1/4'' |
display | 4-digit display |
Working temp. environment | 5~45High purity gas |
Pressure vacuum gauge | -0.1~0.15 MPa, 0.01 MPa/grid |
Shut-off valve | Φ6 |
Internal and external Polished ss pipe | Φ6 |
Relative air humidity | ≤85% |
Working temp. environment | 5℃~40℃ |
voltage | 380V |
pumping rate | 32m³/h |
ultimate vacuum | 5X10-1Pa(No-load & cold state) |
Working pressure range | 1.01325X105~1.33X10-2Pa |
Inlet diameter | KF40 |
outlet diameter | KF40 |
connetcing method | Use bellows, manual baffle valve connected to bellows |
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