Product name |
Vertical PECVD System |
Model |
PT-VT1200-S60LD |
Tube Furnace |
Structure |
Split-type |
|
Insulation layer |
Alumina ceramic fiber |
|
Max. Temperature |
1200℃ |
|
Working Temperature |
≤1100℃ |
|
Outside Shell Temperature |
≤45℃ |
|
Heating Rate |
20℃/min (Suggestion 10℃/min) |
|
Heating Zone Length |
440mm (Single Zone) |
|
Heating Element |
0Cr27Al7Mo2 resistance wire |
|
Temperature Sensor |
K-type thermocouple |
|
Temperature Control Accuracy |
±1℃ |
|
Tube |
Quartz tube1DOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac Φ50, 60, 80, 100, 150mm available. |
|
Temperature Controller |
PID automatic control with 30 programmable segments for precise control |
|
Sealing |
Flanges made of 304SS and silicon rubber rings1DOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac Gas valve on left flange1DOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac Vacuum angle valve with KF25 connector on the right flange1DOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac Note: Standard flange, KF flange and hinge flange are available. |
|
Power Supply |
Single phase, 220V, 50Hz. |
|
Power |
Power 3kW |
Vacuum pump unit |
Vacuum pump1DOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac (With movable box) |
10pa with a mechanical vacuum pump1DOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac 0.001pa with a mechanical vacuum pump and a diffusion vacuum pump. |
|
Pressure Gauge |
Inficon Digital Pressure Gauge with high accuracy1DOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac Measurement Range 1×105--1×10-5Pa |
Plasma RF Power Supply |
Output Power Range |
5-300W Adjustable1DOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac 200w/300w/500w/1000w available. |
|
RF frequency |
13.56 MHz ±0.005% stability |
|
Reflection Power |
200W max |
|
Matching |
Automatic |
|
RF Output Port |
50 Ω, N-type, female |
|
Noise |
<50 dB |
|
Cooling |
Fans |
|
Power |
208-240VAC, Single Phase, 50/60Hz |
Gas-Mixing Unit with mass flow meters1DOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac (Float flow meters are available.) |
Three precise mass flow meters (0.02% accuracy) are installed to control gas flow rate with touchscreen control for easy operation.1DOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac One gas mixing tank is installed on the bottom case.1DOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac MFC 1: Gas flow range from 0~100 SCCM1DOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac MFC 2: Control range from 0~200 SCCM 1DOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac MFC 3: Control range from 0~500 SCCM1DOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac Gas inlet fitting: four 1/4NPS.1DOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac Gas outlet fitting: four 1/4NPS.1DOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac Power: 185-220VAC 50/60Hz1DOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac 4 stainless steel needle valves are installed on the left side to manually control the inlet and outlet of gas. |
Chiller (Optional) |
Be used to cool the tube and vacuum pump. |
Notes |
Pressure higher than 1.02Mpa will break the tube.1DOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac Since the pressure in the gas cylinder is high, a converter is necessary. The measurement range of our converter is 0.01mpa-0.1mpa, will ensure a safe gas supply.1DOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac No vacuum condition is allowed when the temperature is higher than 1000℃.1DOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac Please keep the gas flow lower than 200sccm when the temperature is high to lower the impact of cold air to the hot tube.1DOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac If you have to keep the valves on the two ends of the tube closed at the same time, please watch the pressure gauge and open the valves once the pressure is higher than 1.02Mpa to avoid any tube breakage. |
Warranty |
One year with lifetime technical support. |