Zhengzhou Protech
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CVD equipment for preparing composite oxide hydrogen separation membrane

CVD equipment for preparing composite oxide hydrogen separation membrane

    Application:  Graphene growth, carbon nanotube development, silicon nitride film deposition, two-dimensional material growth, crystal material battery electrode field.
Contace us for customize send-email: info@lab-furnace.com
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Detailed Parameters Of The Product
Main feature
 It can realize the chemical deposition of oxide (SiO2, Al2O3, TiO2, ZrO2) and composite oxide (Al2O3-SiO2, SiO2-TiO2, SiO2-ZrO2) hydrogen separation membrane on porous alumina ceramic tubes and ceramic sheets.
  1) The main body heating is a three-stage heating system with a maximum operating temperature of 1000 ℃;
  2) Three liquid sources heat the evaporation bubbler, the maximum temperature is 300 ℃, and the temperature is controlled independently.
  3) The three channles gas inlet, respectively nitrogen, argon and hydrogen, can directly enter the gas mixing chamber and enter the vacuum chamber, and the flow rate can be controlled separately, and the flow meter control accuracy is ± 1.5% F.S. In addition, nitrogen is used as a purge gas, which enters the three liquid sources in parallel through the flowmeter and then enters the gas mixing chamber. Each of the three channels is equipped with a separate valve control.
  4) The ceramic blind tube has a length of 620mm, an outer diameter of 12mm, and an inner diameter of 9mm. From 250mm to 350mm from the open end, it is a deposition section with an aperture of 0.2μm, and the outer walls of the remaining tubes have been glazed;
  5) The sample of the ceramic sheet has a diameter of 30 mm and a thickness of 3 mm. 3 sample stages, each of which can place 3 ceramic samples at the same time.
  6) space as small as possible
  7) Rear vacuum connection system.
Technical parameter

Furnace structure Open up and down
power 7KW
voltage AC 208-240V Single Phase,50/60 Hz
max. temp. 1000°C
working temp. ≤900°C
suggested heating rate 0-20 ℃/min
tube material 310S tube
tube size shaped Φ80*1200mm+Φ25mm
Insulation device Furnace tubes are equipped with thermal insulation water-cooled flange devices at both ends for easy access
heating zone length 200+200+200mm
constant zone length 400mm
temp. control l PID automatic control and auto-tune function.
l 30 programmable segments for precise thermal processing.
l Built-in protection for the over-heated and broken thermocouple. 
temp. accuracy ±1℃
Heating Element Resistance wire, Fe-Cr-Al Alloy doped by Mo
insulation material Alumina fiber
CVD equipment for preparing composite oxide hydrogen separation membrane


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