Zhengzhou Protech
Zhengzhou Protech
Home > Application > 2d material growth
Non-gaseous source chemical vapor deposition system

Non-gaseous source chemical vapor deposition system

    Application:  Graphene growth, carbon nanotube development, silicon nitride film deposition, two-dimensional material growth, crystal material battery electrode field.
Contace us for customize send-email: info@lab-furnace.com
Zhengzhou Protech Zhengzhou Protech
Detailed Parameters Of The Product
Main feature
  Consists of electric sliding tube furnace, three channles gas supply system, vacuum and filtration system, precursor bubbling device, gas preheating device, software control and other parts. Suitable for precursors that are non-gaseous sources, such as solid or liquid precursors, the filling temperature of the precursor can reach 400 ° C, and the temperature can be adjusted independently. After the solid or liquid precursor is evaporated at a certain temperature, it is brought into the reaction area through inert gas Some CVD reactions.

1.   The intake and exhaust of the left and right ends can be switched between each other; improve the uniformity of the coating on the substrate;
2.    The bottom of the furnace body can be moved horizontally on the guide rail under the drive of the motor, and the moving speed can be set according to the process requirements. 
3.    Using touch screen and industrial control computer automatic control, parameter setting and operation are intuitive and convenient, and parameter automatic record keeping.
4.   The gas supply system can be equipped with several mass flow meters according to the customer's experimental needs. The range of the flow meter is optional. The vacuum system can also be equipped with various vacuum pumps according to the customer's needs.

Technical parameter

Heating system
max. temp. 1200℃
working temp. ≤1100℃
chamber size Φ40*800mm(diameter customzable)
insulation material High purity alumina fiber
thermocouple K type
Accuracy ±1℃
Temperature control 30 programmable segments for precise control of heating rate ,cooling rate and dwell time
10" touch screen built-in PLD
heating zone length 150mm
constant zone length 70mm
heating element                   Fe-Cr-Alloy adopted by Mo
voltage 220V,50Hz
power 2KW
3 channels MFC
Connector style  Φ6mmDouble cutting ferrule stainless steel connector
Standard range(N2) 100sccm,100sccm、200sccm;(OPTIONAL)
Accuracy ±1.5%
Linearity ±0.5~1.5%
Max.pressure  3MPa
Working pressure range 0.1~0.5 MPa
Vacuum unit
Inlet/Outlet caliber KF25
pumping rate 10m³/h
ultimate vacuum 5X10-1Pa
Oil capacity  1.1L
Rotation rate


Zhengzhou Protech

After-sales serveces

After-sales serveces