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model:PT-400C

Front-end preheating molybdenum sulfide preparation equipment

temperature:
- 1200
- 1400
- 1700
chamber size:

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Detailed Parameters Of The Product

Main feature
　　The front end is equipped with a preheater that can be heated to 400 ° C to assist sulfur powder evaporation, and the rear end is a dual-temperature zone vulcanization furnace. The temperature control is accurate and the operation is simple. It is also equipped with an atmosphere fine-tuning device, which can accurately reflect the gas pressure inside the reaction chamber. The adjustment valve with scale is very practical for low pressure CVD and has good repeatability.

Technical parameter

Sulfur powder preheater	model：PT-400C working temp.：350℃ max. temp.：400℃ max. heating rate：30℃/min suggested heating rate：10℃/min temp. control：30 programmable segments for precise thermal processing voltage：AC220 V power：800W temp. accuracy：±1℃ heating element：· Resistance wire, Fe-Cr-Al Alloy doped by Mo
Vulcanization furnace	power(KW):3 voltage(V):AC220v 50/60 Hz max. temp.(℃):1200（1 hour） working temp.(℃）：1100 heating rate（℃/min）：≤50 tube size（mm）： Φ50×1200mm heating zone length（mm）：440mm （mm）:200mm temp. control:l PID automatic control and auto-tune function. l 30 programmable segments for precise thermal processing. l Built-in protection for the over-heated and broken thermocouple. Temperature Accuracy(℃):±1 Heating Element:Resistance wire, Fe-Cr-Al Alloy doped by Mo
gas supply system,GMF3Z	（MFC） weight：35Kg overall size：600x600x650mm Standard range（N2)：50sccm、200sccm、500sccm；（optional） Accuracy：±1.5%
vacuum unit,VAU-02	pumping rate：4Ls ultiamte vacuum：5X10-1Pa oil capacity：1.1L Rotation rate：1450rpm noise：50dB overall size:600×600×600mm