Zhengzhou Protech
Zhengzhou Protech
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4" Polishing Fixture for Precision with Vacuum Chuck for Fa

4" Polishing Fixture for Precision with Vacuum Chuck for Fa

  • temperature:
    • 1200
    • 1400
    • 1700
  • chamber size:
Contace us for customize send-email: info@lab-furnace.com
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Detailed Parameters Of The Product

4" Polishing Fixture for Precision with Vacuum Chuck for Faster Thinning and Polishing - EQ-PF-4-1V

Technical parameters:
  • Precision Polishing Jig for accurate wafer / substrate polishing and back-thinning
  • 4" Diameter sample holder vacuum chuck to take wafer or substrate up to 4"
  • Vacuum chuck can suck wafer through vacuum pump without wax and make wafer sample mounting clean, faster and flat. 
  • 2 feet length vacuum tube is included to connect vacuum pump, which keep vacuum pressure during jig rotation
  • Thickness control screw fixture with resolution of 0.005 mm to limit stock remove
  • One digital micrometer is included with resolution of +/- 1 micron for more accurate control polishing remove
  • Two dead weighs are included for adjusting polishing gravity
  • This Polishing fixture can fit with, Unipol 1202 and Unipol 1502 and any precision 12" or larger polishing machine with York support to achieve automatic polishing or thinning
  • Require a vacuum pump with rate > 70 L/ min.
  • Maximum travel distance: 6.7mm


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