Detailed Parameters Of The Product
Application:
4" Polishing Fixture for Precision with Vacuum Chuck for Faster Thinning and Polishing - EQ-PF-4-1V
Technical parameters:
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Features |
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Precision Polishing Jig for accurate wafer / substrate polishing and back-thinning
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4" Diameter sample holder vacuum chuck to take wafer or substrate up to 4"
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Vacuum chuck can suck wafer through vacuum pump without wax and make wafer sample mounting clean, faster and flat.
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2 feet length vacuum tube is included to connect vacuum pump, which keep vacuum pressure during jig rotation
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Thickness control screw fixture with resolution of 0.005 mm to limit stock remove
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One digital micrometer is included with resolution of +/- 1 micron for more accurate control polishing remove
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Two dead weighs are included for adjusting polishing gravity
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This Polishing fixture can fit with, Unipol 1202 and Unipol 1502 and any precision 12" or larger polishing machine with York support to achieve automatic polishing or thinning
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Require a vacuum pump with rate > 70 L/ min.
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Maximum travel distance: 6.7mm
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