Zhengzhou Protech
Zhengzhou Protech
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Roll to roll pecvd system for constant graphene film production
model:PT-T1200RTR-III-80

Roll to roll pecvd system for constant graphene film production

  • temperature:
    • 1200
    • 1400
    • 1700
  • chamber size:
Contace us for customize send-email: info@lab-furnace.com
Zhengzhou Protech Zhengzhou Protech
Detailed Parameters Of The Product
Main feature                         
Ø Under the vacuum condition , a RF power supply acts on the rare gas in the vacuum chamber to form the plasma equivalent glow effect ( PECVD patent of our company ) , and the field energy of the plasma replaces the thermal energy , so that the growth temperature of the graphene is reduced , and the process conditions are improved .
 
Ø Achieve growth of high quality graphene thin films by controlling nucleation and growth of graphene
 
Ø In this method, copper foil is used as a base, motor drives copper foil to move under closed growth condition, and then it passes through the first temperature zone (annealed area). Graphene will deposit on the copper foil on the second, third temperature zone (growth area)and tighten to the roll by the cooling device  
 
Ø With the advantages of rapid cooling and continuous growth, and can be used for large-scale growth of graphene with large area and high quality.
 
 

Voltage
 
Furnace input AC 208-240V ,50/60 Hz
Power 6KW
Working Temperature
 
· Max. Temperature: 1200 °C  
· Continuous working temperature: 1100 °C
 
Heating Zone
 
· Heating Zone Length:           7.87" ( 200+200+200mm)
· Constant Temperature Zone:  15.74 " (400mm. +/-  1ºC )
 
Heating Elements
 
Fe-Cr-Al Alloy doped by Mo
Processing Tube · High purity quartz tube:  100 mm OD x 1700 mm Length
 
Copper foil width
 
≤80mm
Copper foil running rate
 
8cm/min---50cm/min
Adjustable
RF Signal frequency
 
13.56MHz±0.005%W
Power output
 
0-500W
Vacuum Dgree
 
10-1Pa
    
Dimensions
 
280*60*130cm
Application Note
 
· Equipped with high precision mass flowmeter in the gas system,can control the gas flow
  
· Gas can mix sufficient in required proportion in the  static mixing chamber,
 
Roll to roll pecvd system for constant graphene film production
Roll to roll pecvd system for constant graphene film production

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Zhengzhou Protech

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