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1600C Max Three-Zones PECVD Tube Furnace (80 mm OD) with Pre-Heater and Sliding Rail
model:PT-T1600-PECVD

1600C Max Three-Zones PECVD Tube Furnace (80 mm OD) with Pre-Heater and Sliding Rail

    Application:  1600C Max Three-Zones PECVD Tube Furnace (80 mm OD) with Pre-Heater and Sliding Rail can put solid material in the heater for evaporation and mixing with the vapor phase.
Contact us for customize send-email: info@lab-furnace.com
Zhengzhou Protech Zhengzhou Protech
Detailed Parameters Of The Product
Technical Parameter:
Pre-heating furnace   Small tube furnace with 200mm length single heating zoneYaBMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Max. temperature:  1600ºCYaBMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
30 segment programmable temperature controlYaBMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
The vapor goes through the heater first before getting in the RF Plasma generator.YaBMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
It can put solid material in the heater for evaporation and mixing with the vapor phase.YaBMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Vacuum flange:  included 
YaBMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Tube Furnace
 
Display LEDYaBMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
LED 
Optional LCD Touch Screen  
Chamber Split type and upper part can be opened
Limiting Temp. 1600℃
Continuous Woking Temp. ≤1500℃
Heating Rate Suggestion: 0~10℃/min
Temperature Zone 200mm+200+200mmYaBMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Two programmable precision digital temperature controllers with 30 segments.
Heating Element MoSi2 heaters
Thermocouple B type
Temperature Control Accuracy ±1℃
Tube Size 80mm OD x 3200 mm L  
Tube Material Quartz Tube
Temperature Control PID automatic control via SCR power control
Heating curves 30 steps programmable
Vacuum FlangeYaBMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
Stainless Steel vacuum flange with valveYaBMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
flangeYaBMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
Power 380V, 50 Hz, three phases at max. 14KW
Sliding Manually
Plasma RF Power supply 
Plasma RF Power supply 
Output Power 5 -300W adjustable with ± 1% stability
RF frequency 13.56 MHz ±0.005% stability
Reflection Power 200W max.
Matching Automatic
RF Output Port 50 Ω, N-type, female
Noise <50 dB.
Cooling Air cooling.
Power 220V, 50Hz
YaBMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Vacuum Pump
 
Rotary Vane Vacuum Pump+molecular pump system Vacuum level:6*10-5torrYaBMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
The rotary vane vacuum pump and molecular pump will be designed into a cart with wheel.YaBMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 YaBMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

1600C Max Three-Zones PECVD Tube Furnace (80 mm OD) with Pre-Heater and Sliding RailYaBMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
YaBMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
1600C Max Three-Zones PECVD Tube Furnace (80 mm OD) with Pre-Heater and Sliding RailYaBMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
YaBMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
1600C Max Three-Zones PECVD Tube Furnace (80 mm OD) with Pre-Heater and Sliding RailYaBMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
YaBMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 YaBMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

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