Zhengzhou Protech
Zhengzhou Protech
Home > Products > Tube Furnace > PECVD Furnace

Product

Contact Us

Leave Message

Contact Us

All products are customizable, leave message immediately, we will reply as soon as possible.

Name

Tel/WhatsApp

E-mail *

Country *

Raw Materia

Message *

Verification code *

I can't see clearly, refresh
Large-diameter dynamic plasma assisted roll-to-roll graphene preparation equipment
model:PT-T1200RTR

Large-diameter dynamic plasma assisted roll-to-roll graphene preparation equipment

    Application:  It is mainly used for continuous growth of graphene films or continuous special equipment for linear materials.
Contact us for customize send-email: info@lab-furnace.com
Zhengzhou Protech Zhengzhou Protech
Detailed Parameters Of The Product
IntrodutionIchMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
The system consists of heating furnace,3 channels MFC,vacuum unit,RF generator,cooling device,Sealing device for collecting and releasing copper foil and automatic control system.The unwinding roller and the winding roller are respectively installed in the sealing device for collecting and releasing copper foil, and a cooling device is installed between the output material exhaust cavity and the furnace body.IchMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
IchMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
1.heating system
max. temp 1200℃
working temp. ≤1100℃
tube size Φ150mm Customizable
insulation material Alumina, high temperature fiber products
thermocouple N type
temp. accuracy ±1℃
temp. control · PID automatic control and auto-tune function.IchMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 30 programmable segments for precise thermal processing.IchMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Built-in protection for the over-heated and broken thermocouple. 
Heating Zone Length 200+200+200mm Customizable
Heating Element Fe-Cr-Al Alloy doped by Mo
IchMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
2、RF generator
Power output 0W~1000W
RF output interface 50 Ω, N-type, female
Power stability ≤5W
Harmonic component ≤-50dbc
Machine efficiency >=70%
cooling air cooling
IchMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
3、3 channels MFC
Connector style  Double cutting ferrule stainless steel connector
Standard range(N2) 200sccm,500sccm、1000sccmIchMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Customizable
Accuracy ±1.5%F.S
Linearity ±1%F.S
Repeat accuracy ±0.2%F.S
Response time gas:1~4 Sec,electricity:10 Sec
Working pressure range 0.1~0.5 MPa
Max.pressure 3MPa
Connector Φ6,1/4''
display 4-digit display
Working temp. environment 5~45High purity gas
Pressure vacuum gauge  -0.1~0.15 MPa, 0.01 MPa/grid
Shut-off valve Φ6
Internal and external Polished ss pipe Φ6
IchMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
4、low vacuum unit
Relative air humidity  ≤85%
Working temp. environment 5℃~40℃
pumping rate 32m³/h
ultimate vacuum 5X10-1Pa(No-load & cold state)
Working pressure range 1.01325X105~1.33X10-2Pa
Inlet diameter KF40
outlet diameter KF40
connetcing method Use bellows, manual baffle valve connected to bellows
 
Large-diameter dynamic plasma assisted roll-to-roll graphene preparation equipment
 IchMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
Zhengzhou Protech

After-sales serveces

After-sales serveces