0-2000°C RESEARCH MATERIAL & HEATING TREATMENT'S LEADER
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Product Overview:
This system is a special dual-tube CVD system, which is specially designed for growing thin films on metal foils, especially for the research on flexible metal foil electrodes of a new generation of energy. The sliding furnace can realize rapid heating and cooling of materials.
Technical Parameter:
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product name |
1200℃ double tube CVD system |
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The first part: 1200℃ double tube CVD system |
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Product number |
PT-1200T |
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Furnace tube size |
Double quartz tube Outer tube: OD 100 x ID 96 x 1400 mm Inner tube: OD 80 x ID 75 x 1800 mm |
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Heating zone |
220+220mm |
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Heating element |
Resistance wire |
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Heating rate |
0-20°C/min |
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Thermocouple |
Type N |
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Part 2: Water cooling system |
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Flange |
1. Water chiller CW-3000 2. Water-cooled, sealed double-tube vacuum flange: Allow reaction gas to react between the two tubes (10mm gap), and the cooling gas is directly passed into the inner tube. |
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Part Three Vacuum System |
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Vacuum system |
1. Anticorrosive digital display vacuum gauge 2. VRD-16 rotary vane pump, pumping speed 4L/S, including flapper valve KF25 interface, bellows and box |
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Part Four Air Mixing System |
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Mass flowmeter Range: MFC 1: 0~10 sccm MFC 2: 0~200 sccm MFC 3: 0~10 slm MFC 3: 0~10 slm ....... |
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No. 104, building 31, Xingyang equipment manufacturing industrial park, Zhengzhou City,
Henan Province, China
Zhengzhou Protech Technology Co., Ltd
郑州诺泰科技有限公司
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