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Single Zone CVD System
model:PT-T1200

Single Zone CVD System

    Application:  PT-T1200 CVD is a tube furnace with 100mm diameter quartz tube, vacuum pump and five channels mass flow meters gas flowing system. It can mix 1-5 types of gases for CVD or diffusion. 
Contact us for customize send-email: info@lab-furnace.com
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Detailed Parameters Of The Product
Brief Introduction:  fJrMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
    PT-T1200 CVD is a tube furnace with 100mm diameter quartz tube, vacuum pump and five channels mass flow meters gas flowing system. It can mix 1-5 types of gases for CVD or diffusion. fJrMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 fJrMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Technical Parameter:
Model PT-T1200
Part I: Standard Parts
 fJrMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 fJrMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 fJrMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 fJrMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 fJrMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 fJrMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 fJrMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Tube FurnacefJrMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
fJrMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
Display LCD/LED Touch Screen (Can be customized according to customer needs)
Max. Temp. 1200℃ for short time
Woking Temp. ≤1100℃
Heating Rate Suggestion: 0~10℃/min 
Temperature Zone 440mm (Can be customized according to customer needs)
Heating Element Resistance wire with Mo
Thermocouple N type
Temperature Control Accuracy ±1℃
Tube Size 100 x 1000mm (OD x minimum L) (Can be customized according to customer needs)
Material:  Quartz tube 
Temperature Control PID automatic control via SCR power control
Heating curves 30 steps programmable
Vacuum Flange Stainless Steel vacuum flange.fJrMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
One end of the flange has 1barbed needle valves, with installed Mechanical Pressure Gauge. fJrMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Another end of the flange has a KF25 port with a barbed needle valve
Vacuum Pump Rotary Vane Vacuum Pump Ultimate vacuum 10-3 Torr.fJrMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Vacuum inside the tube is around 10-1 Torr.fJrMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
(RM temp. And empty tube condition)fJrMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Flow rate: 2L/S fJrMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
The rotary vane vacuum pump will be designed into a cart with wheel. With connection accessories fJrMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Digital vacuum gauge is included
Mass Flow MetersfJrMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
(Seven Star Brand)fJrMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 fJrMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
With LCD Touch Screen ControllerfJrMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
(Desigen by Kejia with Kejia logo)
fJrMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
One Float flowmeter + Five precision mass flow meters :fJrMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
MFC Accuracy is: ±1.5% F.S.fJrMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
MFC 1 for nitrogen : Gas flow range from 0~100 sccmfJrMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
MFC 2 for hydrogen : Gas flow range from 0~200 sccmfJrMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
MFC 3 for methan : Gas flow range from 0~300 sccmfJrMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
MFC 4 for argon: Gas flow range from 0~400 sccmfJrMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
MFC 5 for oxygen: Gas flow range from 0~500 sccmfJrMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 fJrMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
One gas mixing tank (for 5 MFC only) is installed on bottom case with 4 stainless steel needle valves is installed on left side of bottom case to control 4 type gases mixing manually.fJrMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
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