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Tube Furnace with Solid Precursor Sublimator for CVD Growth
model:PT-1200X

Tube Furnace with Solid Precursor Sublimator for CVD Growth

    Application:  Widely used in experiments and small batch production in universities, scientific research institutes, industrial and mining enterprises, etc.
Contact us for customize send-email: info@lab-furnace.com
Zhengzhou Protech Zhengzhou Protech
Detailed Parameters Of The Product
Introduction:

     PT-1200X is a compact 1100°C CVD tube furnace with precursor sublimating attachment. Totally four-channel gas inlets are built on the sublimation which allows feedings of various gases to carry the source vapor into the main heater for further decomposition and deposition. The sample holder fixture mounted on the right flange is slidable for easy sample loading/unloading. Such a system configuration is suitable for growing a wide range of transitional metal dichalcogenides (such as MoSe2, MoS2...) and wide bandgap semiconductors (such as h-BN) layers on substrate up to 3" diameter. 3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Technical Parameter:3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Furnace and Preheater3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
graphite tube furnace
3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Compact CVD furnace system is modified from PT-1200X-100 single zone tube furnace:3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 · 4.33" O.D x 4.05" I.D x 29.13" Length quartz tube3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 · 1100ºC Max. working temperature3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 ·  Water cooling flange on right-side is slidable for easy sample loading3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 ·  Water cooling flange on left-side between the heater and furnace is used for pre-heated gas input and sealing3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Four-channel gas inlet ( 1/8" Dia tube and tube fitting) are built-in on the left side flange3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

One small heater is attached to the left side flange of the furnace to preheat input gas, liquid,  or evaporate solid chemical, which will be then delivered to CVD furnace:3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Please click picture left for more details:3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 1.2''O.D x 6''L SS tube as the heating chamber3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 600ºC Max. working temperature3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 · Flange on the left side is for gas sealing and input3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Heating Zone3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· CVD Furnace:  440 mm3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Constant temperature zone: 100 mm 3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Gas Heater:     150mm3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
(Can be customized according to customer needs)
3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Working Temperature3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· CVD Furnace:3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 Max heating temperature: 1100°C ( < 2 hour )3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Continuous working temperature: 200~1000°C3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Max heating & cooling rate: 20°C/min3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Heater: 3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Continuous working temperature: RT~600°C3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Max heating & cooling rate: 20°C/min3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Temperature Control3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
graphite tube furnace
3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· CVD Furnace and Heater (separate temp control):3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Digital controllers with PID/self-tuning functions and 30 segments programmable3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Thermocouple:  K type thermocouples, which feed through the right side flange and control furnace temperature.3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Control accuracy: +/- 1°C3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

RS485 Communications Port3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Vacuum and Gas Sealing & Flange3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

The right flange of CVD furnace3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Water cooling to prevent sealing o-ring from melting (water cooler is not included, please click water chiller to order)3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· KF25 vacuum fitting (to a vacuum pump, please click to order a pump,  vacuum hose, valve and sealing gasket)3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Slidable for the customer to easily and fast push/pull in/out sample3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· One quartz wafer holder ( 3" Dia. ) is included and the flange with heating radiation block 3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· An anti-corrosive capacitance diaphragm gauge is included3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Left flange (between CVD Furnace and Heater) with four 1/8'' fittings for 1/8'' tube:3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Two 1/8'' fitting on the flange for independently and directly delivering any gas into the CVD furnace 3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· One 1/8'' fitting for delivering heated gas from heater to CVD furnace3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· One 1/4'' fitting for bypassing the gas (without heating) to the CVD furnace (inside the CVD furnace, the gas tube is merged with the heated gas pipe by a T fitting)3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Note: How gas pipe assembled in the CVD furnace through above 1/8'' fitting:3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· One 1/4'' quartz tube delivers the vapor gas from heater(also the bypass gas by a T fitting)3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Two 1/4'' quartz tube delivery extra gas via the two separate 1/8'' fitting on the big furnace left the flange3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· These three 1/4'' quartz tubes inside CVD furnace is in parallel and vertically 1'' higher than sample holder3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

·  These three 1/4'' quartz tubes can be easily removed to clean or replaced once get stuck or corroded3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Heater:3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Left flange: one 1/8'' gas fitting to deliver gas to the heater for pre-heating and then to CVD furnace 3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· On the right side to CVD furnace with necessary thermal block material to minimize the temperature gradient at the interface between the heater and CVD furnace3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Furnace Chamber Installation3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· 2- 1/4" pipe adapter is installed on each flange3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
The optional Liquid Injection device3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

For direct liquid CVD  ( DLCVD), you may consider below devices for liquid injection:3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
                   
3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Warranty3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· One year limited warranty for electrical parts. ( Consumable parts such as processing tubes, o-rings and etc are not covered by the warranty)3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· You may order replacement quartz tube here.3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Laptop, software & WiFi Control (Optional)f3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use.3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Temperature Control System enables the user to edit temperature profile, manage heat-treatment recipe, record and plot data for PT furnaces.3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· A wireless remote control provides up to 300 meters operating range.3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Above features are available upon request at an extra cost. Please contact us for more information.3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Warning3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· The tube furnaces with quartz tube are designed for use under vacuum and low pressure <0.2 bars 3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. 3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

·  Vacuum pressures may only be safely used up to 1000°C 3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· The flow rate for gasses should be limited to< 200ml/min) for reducing thermal shocks to the tube3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Operation Demo Video & Instructions3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

     3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

3EGMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
graphite tube furnace
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