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1100℃ Vacuum Chamber Furnace
model:PT-1200X-H8

1100℃ Vacuum Chamber Furnace

    Application:  PT-1200X-H8 is a compact vacuum furnace. It equips a 7.5" ID x 13.4"L Quartz tube chamber sitting horizontally. Water-cooled stainless steel vacuum flanges with valves are installed to achieve a vacuum up to10-5 Torr via turbopump. It is designed for calcining or annealing semiconductor wafers (up to 6") under vacuum or various other gas atmospheres with a temperature up to 1100°C. It also can also be used as a vacuum brazing furnace for fusing small parts.
Contact us for customize send-email: info@lab-furnace.com
Zhengzhou Protech Zhengzhou Protech
Detailed Parameters Of The Product
Specific Introduction:qouMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
    PT-1200X-H8 is a compact vacuum furnace. It equips a 7.5" ID x 13.4"L Quartz tube chamber sitting horizontally. Water-cooled stainless steel vacuum flanges with valves are installed to achieve a vacuum up to10-5 Torr via turbopump. It is designed for calcining or annealing semiconductor wafers (up to 6") under vacuum or various other gas atmospheres with a temperature up to 1100°C. It also can also be used as a vacuum brazing furnace for fusing small parts.qouMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
qouMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
crucible furanceqouMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
qouMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Parameters:
Power 1.Voltage: Single-phase 208 - 240 VAC / 50/60Hz, (25 A breaker installed)qouMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
2.3 KW max.qouMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
3.Note: Power cable included but without the plug. Please install a plug by your own or click link below the picture to choose a plug according to your country or your lab  requirement
Working Temperature 1.<= 1000 °C continuouslyqouMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
2.Max. 1100 °C, < 30 minutesqouMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
3.Temperature Uniformity: +/- 2°C
Heating Rate 1.Max. 20°C/ minqouMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
2.Recommended. 10°C/ min
Heating Elements     High-quality Ni-Cr-Al resistance wire 
Quartz Tube & Effective Heating     1.Tube size: 8" O.D. x 7.5" I.D x 13.4" L. qouMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
2.Heating area: 7.5" ID x 8.5" Depth (7.6Liter)qouMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
3.Uniform Temperature zone:  4"Dia x 3.5" depth in center position within +/- 5ºCqouMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
4.The quartz tube is replaceable 
qouMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Vacuum FlangeqouMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
qouMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
qouMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
qouMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
1.Stainless steel vacuum flange with dual high-temperature silicone O-rings at the front door with water colling portsqouMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
2.1/4 gas inlet & outlet included which allow continuous gas delivery during operation. A gas quartz tube (6.35mm O.D) is provided to reach the location of the sample and deliver reactive gas to the sample directly. qouMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
3.One 1/4 thermocouple feedthrough port allows a 1/4 O.D thermocouple probe to be inserted into the chamber and measure the temperature of the sample independently. (Thermocouple is optional. Click here to find one). Four probes electric resistance measurement feedthrough also is available upon request.qouMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
4.M15 x 1.5mm Thread for both 1/4" feedthroughqouMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
5.One bored Al2O3 foam refractory block (190Dia *  50mm) is provided.qouMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
6.K type 1/4" OD x 18" L thermocouple is included.  qouMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
7.Gas Inlet Tube (O.D 6.35mm, I.D 4.0 mm, L 300mm) is included.  qouMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
8.Mechanical Vacuum Gauge (included as standard accessory), which ranges from -0.1 to 0.15Mpa.
Gas Inlet and Outlet & Water coolingqouMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
   
1.One gas purging inlet (1/4" hose adapter ) with a valve is on the left side of the furnace qouMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
2.The inert gas can be introduced into the chamber via the inlet for purging purposes. qouMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
3.If a continuous gas flow is needed, refer to the additional gas inlet and thermocouple probe below.qouMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
4.A water cooling jacket has been built inside the flange to protect the vacuum sealing O-tings. The inlet and outlet ports located on the left side of the furnace are used for connecting to a water chiller through two 12 mm Dia. polyurethane tubes (16L/minute water flow is required). 
Temperature ControllerqouMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
qouMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
     
1.NRTL certified digital temperature controller is included.qouMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
2.Proportional–integral–derivative control (PID control) and auto-tune functionqouMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
3.30 segments programmed with ramping, cooling, and dwelling stepsqouMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
4.Built-in over-temperature alarm and thermocouple failure alarmqouMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
5.+/- 1 ºC temperature control accuracyqouMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
6.THE Default DB9 PC communication port included for connecting to PCqouMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
7.Temperature Controller is available at the extra cost with +/-0.1°C accuracy. 
OptionsqouMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
   
1.Digital Pressure Gauge (optional) A gas-type independent(above 10mbar) digital vacuum gauge with a wide range between 3.8x10-5 to 1125 Torr.qouMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
2.You may choose a gas mixer to deliver multiple gasses with control over gas composition and flow rate.
Options 1.The sample holder is not provided with the furnace. You may Contact us to order the sample holder separately. qouMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
2.Optional Quartz Thermal Block is available upon request as the refractory block, which can help achieve a higher vacuum level and avoid potential contamination problems, please contact us order Quartz Thermal Block.qouMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
3.A 4-holes 1/4" Alumina Tube can be used for inserting 4 wires (e.g. Pt wires) through the holes for measuring the electrical properties at the high temperature at extra cost.
qouMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
qouMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Vacuum PressureqouMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
qouMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
qouMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
qouMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
qouMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
Vacuum Level is dependent on the vacuum pump used, connected pipe, interior refractory block's materials, etc. By using KFD25, stainless steel pipe, Kejia's two-stage mechanical pump, and KF25 Ball valve, the furnace can achieve vacuum levels below:qouMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
1.10-2 torr via mechanical pump within 30 minutes without thermal BlockqouMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
2.10-4  torr via turbo-pump within 30 minutes with the Quartz Thermal Block at 900CqouMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Optional:qouMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
The vacuum pump and pipe are not included, please contact us to order.qouMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
For achieving a higher vacuum level, a Turbopump is necessary.qouMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Spare sealing O-ring is available at extra cost .qouMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 KF25 Right-Angle Valve for quick connection to KF25 Bellows.
Overall Dimensions 700mm(L) x 440mm(W) x 435mm(H)          
Net Weight 80 kg
Shipping Weight 200 lbs
Shipping Volume 45"(L) x28"(W) x35"(H) 
qouMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Warranty
1.One year limited warranty with lifetime support (consumable parts such as processing tubes, and O-rings are not covered by the warranty.).  qouMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
2.ATTENTION: Any damages caused by the use of corrosive and acidic gasses are not under the coverage of Kejia One Year Limited Warranty.
Compliance CE Certified
Warning  qouMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
1.Tube furnaces with quartz tubes are designed for use under vacuum and at low-pressure <  0.2 bars qouMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
2.Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. qouMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
3.Never heat the furnace while the gas release valve is closed when a positive pressure condition exists within the furnace chamber. qouMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
4.Max. 1000°C is limited on all quartz tube furnaces to avoid the quartz tubes' deformation.
qouMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
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