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model:PT-T1200

Single Zone CVD System

Application

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Detailed Parameters Of The Product

Brief Introduction:
PT-T1200 CVD is a tube furnace with 100mm diameter quartz tube, vacuum pump and five channels mass flow meters gas flowing system. It can mix 1-5 types of gases for CVD or diffusion.

Technical Parameter:

Model		PT-T1200
Part I: Standard Parts
Tube Furnace	Display	7” LCD Touch Screen
	Max. Temp.	1200℃ for short time
	Woking Temp.	≤1100℃
	Heating Rate	Suggestion: 0~10℃/min
	Temperature Zone	440mm
	Heating Element	Resistance wire with Mo
	Thermocouple	K type
	Temperature Control Accuracy	±1℃
	Tube Size	100 x 1000mm (OD x minimum L)
	Tube Size	Material: Quartz tube
	Temperature Control	PID automatic control via SCR power control
	Heating curves	30 steps programmable
	Vacuum Flange	Stainless Steel vacuum flange. One end of the flange has 1barbed needle valves, with installed Mechanical Pressure Gauge. Another end of the flange has a KF25 port with a barbed needle valve
	Power	220V, 50 Hz, single phase at max. 4KW
Vacuum Pump	Rotary Vane Vacuum Pump	Ultimate vacuum 10^-3 Torr. Vacuum inside the tube is around 10^-1 Torr. (RM temp. And empty tube condition) Flow rate: 2L/S The rotary vane vacuum pump will be designed into a cart with wheel. With connection accessories Digital vacuum gauge is included
Mass Flow Meters (Seven Star Brand) With LCD Touch Screen Controller (Desigen by Kejia with Kejia logo)	One Float flowmeter + Five precision mass flow meters : MFC Accuracy is: ±1.5% F.S. MFC 1 for nitrogen : Gas flow range from 0~100 sccm MFC 2 for hydrogen : Gas flow range from 0~200 sccm MFC 3 for methan : Gas flow range from 0~300 sccm MFC 4 for argon: Gas flow range from 0~400 sccm MFC 5 for oxygen: Gas flow range from 0~500 sccm One gas mixing tank (for 5 MFC only) is installed on bottom case with 4 stainless steel needle valves is installed on left side of bottom case to control 4 type gases mixing manually.