Double heat zone tube furnace is a CE spiltable dual zone Tube furnace with 80mm diameter quartz tube, mechanical vacuum pump and four channel gas flowing system. It can achieve a maximum vacuum up to 10-2 torr and mix 1-3 types of gases for CVD or diffusion.
|Power||208-240VAC, 50/60Hz, single phase, 2.5KW ( 20A Breaker required)|
Max. Temperature: 1200°C
Continuous Temperature: 1000°C
|Heating Zone||Two Zones: 200 mm (8") for each zone and total 400 mm heating zone length|
|Constant Temperature Zone||
If two zones are set at the same temperature, constant temperature zone is 10" (250 mm)
long with a temperature discrepancy of +/- 1°C.
If using only one zone (center zone), constant temperature zone is 4.3" (110 mm) long
with a temperature discrepancy of +/- 1°C.
|Max. Heating Rate||0-10 °C /min|
|Tube Size and material||Quartz Tube: 80 ODx 72 IDx 1000 L|
|Temperature Accuracy||+/- 1°C|
|Heating Elements||Fe-Cr-Al Alloy doped by Mo|
Two precision temperature controllers to control two zones separately.
PID automatic control with 30 programmable segments for precise control of
heating rate, cooling rate and dwell time.
Built in overheating & broken thermocouple protection.
Over temperature protection and alarm allows for operation without attendant(s).
+/- 1 ºC temperature accuracy.
RS485 Communications Port.
|Gas Mix Station||
Four precision mass flow controller ( MFC) with digital display
· MFC 1: Control range from 0~100 sccm
· MFC 2: Control range from 0~200 sccm
· MFC 3: Control range from 0~200 sccm
· MFC 4: Control range from 0~500 sccm
Gas route: 4 routes
Flowing rate accuracy: 0.2% accuracy
Gas inlet and outlet: 1/4" swagelok tube connector
One gas mixing tank installed on bottom case with liquid release valve.
Each gas route with SS needle valve to on-off control independently.
120 L/m Rotary Vane Vacuum Pump with Oil Trap (220V single phase) and
stainless steel hose tube are included for connecting to tube furnace.
Max. achievable vacuum pressure is 10^-2 torr.
Power Connection:9 pins D-sub connector.
Power Adapter:One 24V,1A DC power adapter is included and ready to use.
Input voltage for the adpter is 110~240V.
Measurement Range:3.8x10-5 to 1125 Torr.
Display:Digital display (20x14mm) with measurement unit torr
Gauge Fitting:Small Foot-Print with 1/8"NPT fitting
Dimensions:46mm×28mm×126mm ( L x W x H)