Zhengzhou Protech
Zhengzhou Protech
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Small rotary type PECVD Furnace

Small rotary type PECVD Furnace

    Application:  Graphene growth, carbon nanotube development, silicon nitride film deposition, two-dimensional material growth, crystal material battery electrode field.
Contace us for customize send-email: info@lab-furnace.com
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Detailed Parameters Of The Product
Main features
  The tube of the equipment can be rotated 360 degrees, and the quartz baffle on the inner wall of the tube helps the powder to be turned over to help the sintering to be more uniform;
  It can be tilted from left to right at a large angle to facilitate the discharge. The tilt angle is between 0~35°.
  The device is a fully automated Plasma Enhanced CVD System (PECVD),can achieve continuous sliding temperature zones and to continuously control the temperature and plasma intensity.Equipped with vacuum unit,can realize experiments under low pressure conditions, such as low temperature graphene and carbon nanotube growth. PECVD system enables the entire experimental cavity to be in the glow generation area, and the glow is evenly equivalent. This technique solves the unstable state of the traditional plasma operation, so the range and intensity of ionization. It is a hundred times more than traditional PECVD and solves the problem of uneven material accumulation.
  Used for prepare metal composite graphene material,is the most high-end preparation equipment for metal composite material
Technical Parameters

Max. Temp 1100℃

Temperature Controller
PID automatic control and auto-tune function.
30 programmable segments for precise thermal processing.
Built-in protection for the over-heated and broken thermocouple. 
10" LCD touch screen and industrial instrumentation dual temperature control
Heating Elements ·Resistance wire, Fe-Cr-Al Alloy doped by Mo
Temperature Accuracy +/- 1℃
Processing tube  ·Size:Φ25*800(middle sizeΦ50*225)
Furnace tube rotation rate:3~13r/min
Furnace body inclination angle 0~35°(adjustable)
PE source 
Signal frequency 13.56 MHz±0.005%
Power output range 0-150W
RF output interface 50 Ω, N-type, female
Power stability ≤5W
Gas supply system
High precision mass Flowmeter(Range optional) high precise MFC(optional)
Accuracy ±1.5%
Response accuracy ·±0.2%
Response time Gas characteristics:1~4sec
Electrical characteristics:10sec
Working pressure difference range 0.1~0.5MPa
Max. pressure ·3MPa
Connection  Φ6mmDouble clasp stainless steel joint
Vacuum unit
KF25 series bellows and manual stopper valves  
Vacuum up to10-1Pa  
The value can be displayed intuitively by the digital display vacuum tester   


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After-sales serveces

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