Zhengzhou Protech
Zhengzhou Protech
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PECVD system with preheater & double zones sliding tube furnace
model:PT-1200C-II-SL-400C

PECVD system with preheater & double zones sliding tube furnace

  • temperature:
    • 1200
    • 1400
    • 1700
  • chamber size:
Contace us for customize send-email: info@lab-furnace.com
Zhengzhou Protech Zhengzhou Protech
Detailed Parameters Of The Product
Feature & function
  PECVD is to produced plasma by glow discharge .In the glow discharge plasma, the electron density is 109-1012cm3 and the temperature of the electron gas is 10-100 times higher than that of the ordinary gas molecule, which results in the chemical reaction of the gaseous substance containing the thin film. Thus, a new preparation technique for the growth of thin film materials is developed. By reactive gas discharge, the reaction characteristics of non-equilibrium plasma are effectively utilized, and the energy supply mode of the reaction system is fundamentally changed. The low temperature plasma chemical vapor deposition method has all the advantages of the gas phase method, and the process is simple.
Equipped with front-end preheating furnace, auxiliary solid-state source evaporation, back-end double zones heating furnace, accurate temperature control, simple operation, suitable for vapor deposition, two-dimensional materials, plasma treatment growth process, and also suitable for rapid rise Cooling CVD experiment.
 1.Compared with traditional CVD systems, the growth temperature is lower.
 2.realize rapid heating/cooling rate with sliding furnace
 3.The glow of the whole tube is uniform and equivalent, and grows uniformly
 
 1.heating system

max. temp 1200℃
working temp. ≤1100℃
tube size Φ50mm(customzable)
insulation material Alumina fiber
thermocouple K type
temp. accuracy ±1℃
Temp. control                PID automatic control with 30 steps programmable
Heating zone 200+200mm
Constant zone 100+100mm
Heating element                                          Fe-Cr-Al Alloy doped by Mo
voltgae single phase,220V,50Hz
2、preheater
max. temp 400℃
tube size Φ50mm(customzable)
insulation material Alumina fiber
thermocouple K type
temp. accuracy ±1℃
temp. control PID automatic control with 30 steps programmable
Heating zone 100mm
Heating element Fe-Cr-Al Alloy doped by Mo
power 800W
 
3、RF generator

Output power 0W~500W
Max. Reflection power 100W
Signal frequency 13.56MHz±-0.005%
 
4、three channles Gas supply system

connector double cover stainless steel fitting
Standard range(N2) 50sccm,100sccm、500sccm(optional)
Accuracy ±1.5%FS
 
5、Low vacuum unit

relative air humidity ≤85%
Pumping rate 32m³/h
Vacuum 5X10-1Pa 
 PECVD system with preheater & double zones sliding tube furnace
 

Product

Zhengzhou Protech

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