Zhengzhou Protech
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PECVD system with small sliding tube furnace

PECVD system with small sliding tube furnace

    Application:  Graphene growth, carbon nanotube development, silicon nitride film deposition, two-dimensional material growth, crystal material battery electrode field.
Contace us for customize send-email: info@lab-furnace.com
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Detailed Parameters Of The Product
This sliding PECVD system is a modular combined assembly equipment. Consists of manual sliding heat field (multiple temperature regions of thermal field, optional heating length,) vacuum unit, gas supply system, RF power supply plasma excitation system, etc. Each module can be moved independently.
The whole experimental cavity is in the glow generation region, uniform equivalent glow, this technology is a good solution to the traditional plasma work instability, In this way, the range and intensity of ionization is 100 times of that of the traditional PECVD, to the uneven accumulation of materials . 

 1.heating system

max. temp. 1200℃
working temp. ≤1100℃
tube size Φ50mm
insulation material Alumina fiber
thermocouple K type
temp. accuracy ±1℃
temp. control l PID automatic control and auto-tune function.
l 30 programmable segments for precise thermal processing.
l Built-in protection for the over-heated and broken thermocouple. 
heating zone length 230mm
constant zone length 100mm
heating element Resistance wire, Fe-Cr-Al Alloy doped by Mo
voltage single phase,220V,50Hz
2、RF generator

Output power 0W~150W
RF output port 50 Ω, N-type, female
Power stability ≤5W
Harmonic component ≤-50dbc
voltage single phase(187V-253V) 50/60HZ
Overall efficiency >=70%
Power factor >=90%
Cooling air cooling  

3、Gas supply system
connnector double cover stainless steel fitting
standard range(N2) 50sccm,100sccm、500sccm
Accuracy ±1.5%F.S
liner ±1%F.S
Max. pressure 3MPa

4、vacuum unit
Rotate rate 1450rpm
Pumping rate 10m³/h
ultimate vacuum 5X10-1Pa
Oil Capacity  


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