Zhengzhou Protech
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CVD with sliding furnace for graphene production

CVD with sliding furnace for graphene production

    Application:  Graphene growth, carbon nanotube development, silicon nitride film deposition, two-dimensional material growth, crystal material battery electrode field.
Contace us for customize send-email: info@lab-furnace.com
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Detailed Parameters Of The Product
1200℃ CVD System With Sliding Tube Furnace, 3Channels MFC and low vacuum unit       

Main features:
1.PT-1200C-SL sliding RTP furnace is developed from the split furnace.
2..It can be used for graphene-growing or CVD system for the experiment of the RTP requirement 
3.You can put the constant temperature zone to the field of sample or push the high-temperature zone away from
the sample to accelerate the process of heating &cooling.

Technical Parameter:

1200℃ Sliding Tube Furnace PT-1200C-SL
Power 3KW
Voltage AC 220V,50/60HZ
Temperature Max.temperature 1200ºC(1 hour)
Working temperature ≤1100 ºC
Suggested heating rate ≤15℃/min
Tube size High purity quartz tube O.D60*1200mm(optional)
Two fibrous ceramic tube blocks are included for blocking heat radiation generated from tube center. (Ceramic blocks must be fully inserted into the furnace chamber before heating).
Heating zone length
Constant zone length
Temperature control *30 programmable segments for precise control of heating rate ,cooling rate and dwell time.
*Built in PID auto tune function with overheating&broken  thermocouple 
broken protection and over temperature protection   
*Alarm allows for operation without attendants.
Temperature accuracy ±1℃
Heating element Fe-Cr-Al Alloy doped by Mo
Thermocouple K type
Standard accessories quartz tube 1 piece,stainless steel sealing flange 1set,silicon sealing ring2sets,high temperature glove1pair,quartz block 2pieces.furnace hook 1piece
Optional accessories quartz crucible,quartz hook ,manual baffle valve,bellow
 pipe,vacuum gauge ,vacuum gauge  and crucible hook 
Size 620*450*530mm
Net weight 52KG
3 Channels Mass Flowmeter Control 
Net weight About 40kg
Range ability 100 ,200,500SCCM(standard gas is N2,range ability can be chose)
Working environment 5-45℃
Pressure differential 0.1~0.5 MPa
Max.pressure 3MPa
Mixing tank φ80*140mm
Accuracy ±1.5% FS 
Low Vacuum Unit
Relative air humidity ≤85%
Working voltage 220V±10%  50~60HZ
Power 1KW
Air bleed rate 8m³/h
Max.vacuum lever 4X10-2Pa
Experiment vacuum 1.0X10-1Pa
Oil capacity 1.1L
Inlet&Outlet port KF25
Rotation rate 1450rpm
Noise 50dB
Dimension 600×600×600mm
 CVD with sliding furnace for graphene production


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