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model:PT-T1200

PT-T1200 Double Zones CVD System

Application

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Detailed Parameters Of The Product

Brief Introduction:
PT-T1200 CVD is a tube furnace with 60mm diameter alumina tube, vacuum pump and four channels mass flow meters + one float flowmeter gas flowing system. It can mix 1-4 types of gases for CVD or diffusion.

Technical Parameter:

Model		PT-T1200
Part I: Standard Parts
Tube Furnace	Display	LED type
	Max. Temp.	1200℃ for limiting
	Woking Temp.	≤1100℃
	Heating Rate	Suggestion: 0~10℃/min,max. 15℃/min
	Temperature Zone	300mm + 300mm dual zones
	Heating Element	Resistance wire
	Thermocouple	K type
	Temperature Control Accuracy	±1℃ ()
	Tube Size	60 / 52mmx 1000mm (OD/ID x L)
	Tube Size	Material: Quartz tube
	Temperature Control	PID automatic control via SCR power control
	Heating curves	30 steps programmable
	Vacuum Flange	Stainless Steel vacuum flange. One end of the flange has 2 barbed needle valves, with installed Mechanical Pressure Gauge. Another end of the flange has a KF25 port with a barbed needle valve
	Power	220V, 50 Hz, single phase at max. 6KW
Vacuum Pump	Rotary Vane Vacuum Pump	Ultimate vacuum 10^-3 Torr. Vacuum inside the tube is around 10^-1 Torr. (RM temp. And empty tube condition) Flow rate: 2.6 L/S (pump photo is only for reference, actual appearance depends on final desgin) The rotary vane vacuum pump will be designed into a cart with wheel. With connection accessories Digital vacuum gauge is included 3.8x10^-5 to 1125 Torr measurement range Anti-corrosive, gas-type independent
Customized Mass Flow Meters (Seven Star Brand) With LCD Touch Screen Controller	One Float flowmeter + Four precision mass flow meters : MFC Accuracy is: ±1.5% F.S. MFC 1 for Nitrogen : Gas flow range from 0~100 sccm MFC 2 for Hydrogen : Gas flow range from 0~100 sccm MFC 3 for Methan : Gas flow range from 0~100 sccm MFC 4 for Argon: Gas flow range from 0~100 sccm MFC 5 for Oxygen: Gas flow range from 0~100 sccm FFC 1 for Argon and nitrogen mixing gas: Gas flow range 0~100sccm One gas mixing tank (for 5 MFC only) is installed on bottom case with 5 stainless steel needle valves is installed on left side of bottom case to control 5 type gases mixing manually.