Zhengzhou Protech
Zhengzhou Protech
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Touch Screen CVD Tube Furnace
model:PT-T1600CVD

Touch Screen CVD Tube Furnace

    Application:  PT-T1600 Touch Screen CVD is a tube furnace with 80mm diameter alumina tube and three channels Mass Flow Meters gas flowing system. It can mix 1-3 types of gases for CVD or diffusion. 
Contace us for customize send-email: info@lab-furnace.com
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Detailed Parameters Of The Product
Brief Introduction:  
PT-T1600 Touch Screen CVD is a tube furnace with 80mm diameter alumina tube and three channels Mass Flow Meters gas flowing system. It can mix 1-3 types of gases for CVD or diffusion. 
 
Technical Parameter:
Model PT-T1600 CVD with 3 MFC Gas channels
Tube Furnace Display LCD Touch Screen
Max. Temperature 1600℃ for short time
Continuous Working Temp. ≤1500℃
Heating Rate Suggestion: 0~10℃/min
Temperature Zone 300mm
Heating Element MoSi2 Heaters
Thermocouple B Type
Temperature Control Accuracy ±1℃
Tube Size 80x1000mm (OD x L)
Material:  Alumina Tube
Tube Block Two fibrous ceramic blocks are included for blocking heat radiation from inside tube (Ceramic blocks must be fully inserted into the furnace chamber before heating).
Temperature Control PID automatic control via SCR power control
Program and Ramps 30 steps programmable
Vacuum Flange Stainless Steel vacuum flange with valves
Power 220V, 50 Hz, single phase at max.6KW
Mass Flow Meters
(LCD Touch Screen)
Three precision mass flow meters :
MFC 1: Gas flow range from 0~100 sccm
MFC 2: Gas flow range from 0~200 sccm
MFC 3: Gas flow range from 0~200 sccm
(Gas flow range can be according to your requirement)
One gas mixing tank is installed on bottom case with 3 stainless steel needle valves is installed on left side of bottom case to control 3 type gases mixing manually
 
 
 

 

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