Zhengzhou Protech
Zhengzhou Protech
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Customized  CVD System
model:PT-T1600-CVD

Customized CVD System

    Application:  It is mainly used to form a dense HfCl4 coating on the surface of the target material.
Contace us for customize send-email: info@lab-furnace.com
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Detailed Parameters Of The Product

1.Tube Furnace Part:
Technical Parameter:
Tube Furnace
Max. Temperature 1600℃
Tube Size Φ100mm
Heat zone length 300mm
Heating element MoSi2 rods
Thermo couple B Type
Display LED
Tube material Alumina
Chamber material Ceramic fiber
Furnace shell material Carbon steel
Temperature Control PID automatic control via SCR power control
Heating Rate 0~20℃/max.(Suggest 0-10℃/min)
Temperature control accuracy ±1℃
Temperature uniformity ±5℃
Max. Power 4.0KW
Heating curves 30 steps programmable
Working Voltage 220V, 50HZ (or according to your requirement)
Vacuum Flange Water cooling flange with valve
Float  flowmeter
Four float  flowmeters FFC 1: H2   Gas flow range from 0~500 sccm
FFC 2: CH4  Gas flow range from 0~100 sccm
FFC 3: Ar1:  Gas flow range from 0~700 sccm
FFC 4: Ar2:  Gas flow range from 0~700 sccm
( Gas flow range according to your requirement)
Mass flowmeter
 
 
 
Mass flowmeter
Four precision Mass flowmeter :
MFC 1: H2   Gas flow range from 0~500 sccm
MFC 2: CH4  Gas flow range from 0~100 sccm
MFC 3: Ar1:  Gas flow range from 0~700 sccm
MFC 4: Ar2:  Gas flow range from 0~700 sccm
( Gas flow range according to your requirement)

 

2.Gas mixer part:
Technical Parameter :

Display LED
Max. Temperature 1200℃ for short time
Continuous Working Temp. ≤1100℃
Heating Rate Suggestion 0~10℃/min(max. 20℃/min)
Tube material 310S
Temperature heating zone About 200mm(According to design)
Diameter About OD165mm(According to design)
Temperature Control Accuracy ±1℃
Heating Element Resistance wire
Thermocouple K Type
Max. Power 2.0 KW
Working Voltage 220V, 50HZ (or according to your requirement)
Temperature Control PID automatic control via SCR power control
Heating curves 30 steps programmable
Chamber material Alumina Fiber

 3.Crucible furnace part
Technical Parameter :
Max Temperature 1200℃
Crucible diameter 250mm
Crucible depth 400mm
Heating element Resistance wire
Thermo couple K Type
Chamber material Ceramic fiber
Furnace shell material Carbon steel
Crucible material Stainless steel 310S
Temperature Control PID automatic control
Heating Rate Max. 0~20℃/min
Temperature control accuracy ±1℃
Temperature uniformity ±5℃
Max. Power 4.5KW
Working Voltage 220V, 50HZ (or according to your requirement)

Product

Zhengzhou Protech

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